WHITE PAPERS

2016 - Simultaneous blood flow and blood oxygenation measurements using a combination of diffuse speckle contrast analysis and near-infrared spectroscopy

2014 - Towards telecommunication payloads with photonic technologies

2013 - Trimodal detection of early childhood caries using laser light scanning and fluorescence spectroscopy: clinical prototype

2013 - A fiber-optic system for dual-modality photoacoustic microscopy and confocal fluorescence microscopy using miniature components

2012 - Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning

2011 - Effects of Radiation on MEMS

2011 - Digital optical tomography system for dynamic breast imaging

2006 - A flexible telecom satellite repeater based on microwave photonic technologies

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MEMS MIRRORS MM2536-2

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OVERVIEW

The Sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feedback loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.

Electrostatic driven mirrors combine the high pointing stability and the high fill factor required typically in fiber optic components.

	FEATURES	APPLICATIONS
	Low drift	Optical Beam Steering
	±3.5°	Reconfigurable Add-Drop Multiplexer
	2 independent axes	Vibration control in free space optics
	Continuous tilting	Optical Processor
	Single mirror
	1 mm diameter mirror
	High fill factor

datasheet mVOA DSC 3897

TECHNICAL SPECIFICATIONS

	Unit	Min	Typ	Max
Max actuation Voltage	V		40	44
Surface Finish	-	Gold or Aluminium
Reflectivity (900-2000 nm)	%		95
Mirror Size – X	μm	1000
Mirror Size – Y	μm	1000
Mirror Radius of Curvature	m	1.0
Tilt Angle – X (Mechanical) @ 40V	°		±3.5
Tilt Angle – Y (Mechanical) @ 40V	°		±3.5
Resonance Frequency X	Hz		>700
Resonance Frequency Y	Hz		>700
Package		T046
ESD	Unprotected = VERY SENSITIVE Over voltage above 45 V can permanently damage the device.

PACKAGE DIMENSIONS

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