MEMS FOUNDRY FOR SILICON WATCH COMPONENTS
SILICON MICRO PARTS
For precision springs, ultra flat mechanical parts and applications usesd in watchmaking, silicon micro mechanics offers unrivaled precision. Sercalo runs an in house MEMS foundry that proposes MEMS foundry services for the production of single and multi-level parts in silicon.
The Sercalo MEMS foundry manufactures silicon precision micro parts based on deep reactive ion etching. This MEMS foundry technology achieves better precision and surface quality compared to traditional machining techniques such as milling or laser.
Our MEMS foundry team has over 20 years experience in etching optically flat surfaces. On this technological base we offer MEMS foundry etching services for ultra precise silicon micro parts of unmatched surface quality.
Minimum feature size can be as low as 5 µm with an aspect ratio up to 50, i.e. parts can be made out of structures with beams that are 5 µm wide and 250 µm tall.
Typically, the parts are made out of 1 layer, but also 2 and 3 layered designs are possible.
Structure height is between 100 µm up to 400 µm.
| # | FEATURES | APPLICATIONS |
|---|---|---|
| 1 | Precision < 1 µm | 2-D Fiber arrays |
| 2 | Vertical walls | Silicon Hairspring |
| 3 | Up to 400 µm thick parts | Micro Optical Bench |
| 4 | Surface Treatments |
