MM160110-2-15 | Rev. 90-1221-2
MEMS MIRROR MM160110-2-15 | Rev. 90-1221-4
The 2-D mirror has a large reflective surface of 16x11mm. Using magnetic actuation, the deflection angle is set linearly with the driving current. As an option, the device could include an internal optical feedback sensor for closed loop actuation.