MEMS foundry services
MICROFABRICATION OF PARTS IN SILICON
Sercalo runs a MEMS Fab in house that proposes microfabrication foundry services producing single and multi-level parts in silicon.
The Sercalo foundry manufactures silicon precision micro parts based on deep reactive ion etching. This MEMS foundry technology achieves better precision and surface quality than traditional machining techniques such as milling or laser. Our foundry service team has over 20 years experience in etching optically flat surfaces. Based on this technological expertise, we offer etching services for ultra precise silicon micro parts of unmatched surface quality. Minimum feature size can be as low as 5 µm with an aspect ratio up to 50, i.e. parts can be made out of structures with beams that are 5 µm wide and 250 µm tall. Typically, the parts are made out of 1 layer, but also 2 and 3 layered designs are possible. Structure height is between 100 µm up to 400 µm.
Your MEMS solution only a click away
Along with a range of standard products also available through its global distribution network, Sercalo offers personalized services for the design of custom optical MEMS. Get in touch, we are ready to create with you optimal and sustainable solutions.
